Pod cover removing-installing apparatus

ABSTRACT

A pod cover removing-installing apparatus can open and close any covers for a variety of pods made by a various manufactures, can satisfy an allowable distortion error capable of being normally operated even if conditions such as temperature, humidity, and can remove and install the cover without causing it to collide with any one of the parts of the pods. The pod cover removing-installing apparatus to remove and install a cover for an opening of a pod, the inside of which is kept extremely clean, by causing the cover to engage a door for an opening of a high cleanliness room, while maintaining high cleanliness of the pod and the room by closely attaching the circumference of the two openings. The apparatus is provided with positioning pins for positioning the cover, a fine adjustment mechanism for fine adjustment of the positioning pins, and a holding mechanism for holding the position of the cover engaging the positioning pins.

CROSS REFERENCE TO RELATED APPLICATION

This application is a Divisional of application Ser. No. 09/997,265filed Nov. 30, 2001, now issued as U.S. Pat. No. 7,112,027, andincorporated by reference herein.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a pod cover removing-installingapparatus for a pod which contains and transfers thin substrates such assemiconductor wafers from one space to another space while maintainingthe cleanliness of both spaces.

2. Description of the Background Art

FIG. 21 shows an example of a conventional pod cover removing-installingapparatus.

This conventional pod cover removing-installing apparatus 100 isprovided with a diaphragm 101 which partitions off a high clean space Aand a low clean space B, an opening 102 formed in the diaphragm 101 thatserves as a passage between the high clean space A and the low cleanspace B, a door 103 which opens and closes the opening 102 of thediaphragm 101, a latch mechanism 104 that latches the cover 203 of thepod 200 with two positioning pins 104 a, 104 b and two T-shaped keys 104c, 104 d provided in the door 103, and a table 105 provided in the lowclean space B for mounting the pod 200, which has three positioning pins105 a, 105 b, 105 c and one lock key 105 d.

The pod 200 is a container with an extremely clean internal space C forcontaining a plurality of semiconductor wafers (25 wafers, for example).

This pod 200 is provided with a main container body 201, an opening 202provided on one side of the main container body 201, a cover 203 foropening and closing the opening 202, the cover 203 having pin holes 204a, 204 b for engaging the positioning pins 104 a, 104 b, and key holes204 c, 204 d for engaging T-shaped keys 104 c, 104 d, and a bottom 205having grooves 205 a, 205 b, 205 c possessing a V-shaped section forengaging the positioning pins 105 a, 105 b, 105 c, and a key hole 205 dfor engaging the lock key 105 d.

When the pod 200 is placed on the table 105, the three positioning pins105 a, 105 b, 105 c engage the V-shaped section-possessing grooves 205a, 205 b, 205 c. In this instance, switching on a lock button, not shownin the drawing, causes the lock key 105 d to move upward, become angled,and engage the key hole 205 d. Then, the table 105 moves toward thediaphragm 101 for a prescribed distance (about 30 mm, for example),thereby causing the pod 200 to become attached to the diaphragm 101. Asealing material such as an O-ring, not shown in the figure, is providedalong the circumference of the opening 102 of the diaphragm 101 and theopening 202 of the pod 200, to ensure close attachment of the openingsand maintain cleanliness.

The movement of the table 105 causes the cover 203 of the pod 200 tobecome closely attached to the door 203, whereby the positioning pins104 a, 104 b engage the pin holes 204 a, 204 b of the cover 203 and theT-shaped keys 104 c, 104 d engage the key holes 204 c, 204 d.Thereafter, the T-shaped keys 104 c, 104 d are rotated 90° by a rotaryactuator or the like, not shown in the figure, whereby nails 204 e to204 h are pulled in to release the lock between the container main body201 and the cover 203.

Then, the door 103 is pulled into the space A (arrow D1) and caused todescend (arrow D2) by a drive mechanism, not shown in the figure,whereby the internal space C of the pod 200 and the internal space A ofthe partition board 101 are brought into communication while maintainingcleanliness.

In the conventional technology mentioned above, the pod 200 is made froma resin by molding. Because the formed article may be distorteddepending on molding conditions or temperatures, the positioning pins104 a, 104 b, the pin holes 204 a, 204 b of the cover 203, and the keyholes 204 c, 204 d are tapered to ensure a smooth removing-installingoperation.

However, when wafers with a large diameter (exceeding 300 mm) are placedin the pod 200, a very stringent standard is necessary to secure anallowable distortion error of ±0.5 mm. For this reason, significantdifficulties may be encountered for performing the above operation in astable manner. The following countermeasures are considered to overcomethis problem.

(A) One method is to precisely fabricate and adjust each pair of themain container body 201 and cover 203, and assemble the apparatus usingsuch a pair of the main container body 201 and cover 203. However, thismethod requires readjustment of the apparatus when another pod is used.

(B) Another method is to absorb a deviation between the main containerbody 201 and the cover 203 by designing the main container body 201 tobe slightly movable. This method is effective for a small distortion,but ineffective for a large distortion. For example, even if there areno problems when the apparatus is new, distortions will be produced intwo or three years after fabrication and the apparatus may not operatesmoothly as time goes by.

An object of the present invention is to provide a pod coverremoving-installing apparatus for a pod which can open and close anycover for a variety of pods made, according to the SEMI standard, by avariety of manufacturers. These pods can satisfy an allowable distortionerror and are capable of being normally operated even if conditions suchas temperature, humidity, and use for such a variety of pods change, andthe covers of these pods can be removed and installed without causing itto collide with any one of the parts of the pods.

SUMMARY OF THE INVENTION

To achieve the above object, a first invention provides a pod coverremoving-installing apparatus to remove and install a cover for anopening of a pod, the inside of which is kept extremely clean, bycausing the cover to engage a door for an opening of a high cleanlinessroom, while maintaining high cleanliness of the pod and the room byclosely attaching the circumference of the two openings, wherein thecover removing-installing apparatus comprises a positioning member todetermine the position of the cover, a fine adjustment mechanism tofinely adjust the position of the positioning member, and a holdingmechanism to hold the position of the cover mated with the door by thepositioning member.

A second invention provides the cover removing-installing apparatusdescribed in the first invention, wherein the door is provided with abase plate and a position adjusting plate movable in the directionvertical to the plane, the positioning member is provided in theposition adjusting plate. The fine adjustment mechanism is provided inthe base plate and supports the position adjusting plate movable in thedirection vertical to the plane, and the holding mechanism is providedin the base plate and holds the position of the position adjustingplate.

A third invention provides the cover removing-installing apparatus ofthe second invention, further having a centering mechanism for returningthe position adjusting plate to the center.

A fourth invention provides the cover removing-installing apparatus ofthe second invention, further provided with a locking member which isprovided in the position adjusting plate, rotates around the axis of theposition adjusting plate, and engages the cover for locking orunlocking, a lock drive means which is provided on the base plate sideto rotate the lock member, and an eccentric transmission mechanism whichtransmits the rotational power of the lock drive means to the lockmember while allowing a deviation of the base plate and positionadjusting plate in the direction vertical to the plane.

A fifth invention provides the cover removing-installing apparatus ofthe first to fourth inventions, wherein the holding mechanism cancelsthe holding of the position adjusting plate before the locking meanslocks the cover and holds the position adjusting plate after the lockmember locks the cover.

A sixth invention provides the pod cover removing-installing apparatusaccording to any one of the first to fifth inventions, wherein the lockmember cancels the lock in an initial stage of the inserting operationfor inserting the cover into the opening of the pod.

A seventh invention provides a pod cover removing-installing apparatusto remove and install a cover for an opening of a pod, the inside ofwhich is kept extremely clean, by causing the cover to engage a door foran opening of a high cleanliness room, while maintaining highcleanliness of the pod and the room by closely attaching thecircumference of the two openings, wherein the cover removing-installingapparatus comprises a lock member to lock the cover by engaging the sameand a cover securing means to secure the cover to the door by retractingthe lock member to the door side.

An eighth invention provides a pod cover removing-installing apparatusto remove and install a cover for an opening of a pod, of which theinside is kept extremely clean, by causing the cover to engage a doorfor an opening of a high cleanliness room, while maintaining highcleanliness of the pod and the room by closely attaching thecircumference of the two openings, wherein the cover removing-installingapparatus comprises a positioning member to determine the position ofthe cover by engaging the engaged part of the cover and a positionsecuring means to position and secure the positioning member to theengaged part of the cover by changing the external diameter of thepositioning member.

A ninth invention provides the pod cover removing-installing apparatusaccording to the eight invention, wherein the position securing means isprovided in the circumference of the positioning member and has astretch member capable of stretching according to an increase ordecrease in the internal pressure.

A tenth invention provided the pod cover removing-installing apparatusaccording to the eight invention, wherein the position securing means isformed in the positioning member and has a broken part to change thediameter thereof by a mechanical force.

An eleventh invention provides the pod cover removing-installingapparatus according to any one of the first to tenth inventions, whereinthe positioning member has an outer casing with a tapered end, an innercasing installed freely movably in the axial direction of the outercasing, having a taper with the same angle as the taper of the outercasing at its end, and arranged so that the two tapers become continuouswhen protruding, and a pushing means to push the inner casing in theprotruding direction.

A twelfth invention provides the pod cover removing-installing apparatusaccording to any one of the first to eleventh inventions, furthercomprising a linking posture corrective means which corrects the linkingposture of the pod, a pod table having the pod installed thereon tocarry the positioning member to the linking position, a securing meansto secure the pod on the pod table, containing a V-section grooveprovided on the bottom of the pod and a linking pin provided on the podtable for engaging the V-section groove, wherein the linking posturecorrective means is provided in the range in which the linking pin andthe V-section groove can come into contact with each other andconstitutes a fixed plane almost vertical to the moving direction of thepod table.

A thirteenth invention provides the pod cover removing-installingapparatus according to any one of the first to eleventh inventions,further comprising a linking posture corrective means which corrects thelinking posture of the pod, wherein the linking posture corrective meanscomprises a pressing member provided on the periphery of the door topress the top and/or the side of the cover of the pod and capable offreely moving in the moving direction of the table or in the verticaldirection thereto within a prescribed movable range.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view showing an outline of a first embodiment ofthe cover removing-installing apparatus for a pod of the presentinvention.

FIG. 2 is a front view of the first embodiment of the coverremoving-installing apparatus for a pod of the present invention.

FIGS. 3( a) and 3(b) are enlarged views of the part III of FIG. 2 andshow the fine adjustment mechanism for the pod cover removing-installingapparatus of the first embodiment.

FIGS. 4( a) and 4(b) are enlarged views of the part IV of FIG. 2 andshow the centering mechanism for the pod cover removing-installingapparatus of the first embodiment.

FIG. 5 is a cross sectional view along the line V-V of FIG. 2 and showsthe holding mechanism of the pod cover removing-installing apparatus ofthe first embodiment.

FIG. 6( a) is a perspective view and FIG. 6( b) is a cross sectionalview along the line VI-VI of FIG. 2, showing an eccentric transmissionmechanism for the pod cover removing-installing apparatus of the firstembodiment.

FIG. 7 is a cross sectional view along the line VII-VII of FIG. 2 andshows the positioning securing means of the pod coverremoving-installing apparatus of the first embodiment.

FIG. 8 is a block diagram showing a control means for the pod coverremoving-installing apparatus of the first embodiment.

FIG. 9 is a flowchart showing an operational example (cover openingoperation 1) for the pod cover removing-installing apparatus of thefirst embodiment.

FIG. 10 is a flowchart showing an operational example (cover openingoperation 2) for the pod cover removing-installing apparatus of thefirst embodiment.

FIG. 11 is a flowchart showing an operational example (cover closingoperation 1) for the pod cover removing-installing apparatus of thefirst embodiment.

FIG. 12 is a flowchart showing an operational example (cover openingoperation 2) for the pod cover removing-installing apparatus of thefirst embodiment.

FIG. 13 is a front view showing the main part of a second embodiment ofthe cover removing-installing apparatus for a pod of the presentinvention.

FIGS. 14( a) and (b) are drawings showing the main part of the secondembodiment of the pod cover removing-installing apparatus of the presentinvention, wherein FIG. 14( a) is a cross sectional view along the lineA-A of FIG. 13 and FIG. 14( b) is a cross sectional view along the lineB-B of FIG. 13.

FIGS. 15( a) and (b) are drawings showing the main part of the secondembodiment of the pod cover removing-installing apparatus of the presentinvention, wherein FIG. 15( a) is a drawing viewed from the arrow E inFIG. 15( b) and FIG. 15( a) is a cross sectional view along the line C-Cof FIG. 13.

FIGS. 16( a) and (b) are cross sectional views along the line D-D ofFIG. 13 showing the main part of the second embodiment of the coverremoving-installing apparatus for a pod of the present invention.

FIG. 17 shows a holding mechanism of the pod cover removing-installingapparatus according to the third embodiment.

FIGS. 18( a), (b), and (c) are drawings showing a positioning member ofthe pod cover removing-installing apparatus according to the fourthembodiment.

FIGS. 19( a), (b), (c), and (d) are drawings showing a table positioningmember of the pod cover removing-installing apparatus according to thefifth embodiment.

FIGS. 20( a) and (b) are drawings showing a positioning member of thepod cover removing-installing apparatus according to the sixthembodiment.

FIG. 21 shows an example of a conventional pod cover removing-installingapparatus.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention will be described in more detail by way ofpreferred embodiments with reference to the attached drawings.

First Embodiment

FIGS. 1 and 2 are drawings showing a first embodiment of the pod coverremoving-installing apparatus of the present invention, wherein FIG. 1is a perspective view showing an outline and FIG. 2 is a plan view ofthe apparatus.

This pod cover removing-installing apparatus is provided with adiaphragm 11, an opening 12, a door 13 which opens and closes theopening 12 of the diaphragm 11, two positioning pins 14 a, 14 b and twoT-shaped keys 14 c, 14 d, a latch mechanism 14 which opens and closes acover 203 of a pod 200, and the like.

In the first embodiment, the door 13 is provided with a base plate 13Aand a position adjusting plate 13B movable in the direction vertical tothe plane so that its position can be adjusted with respect to the baseplate 13.

The door 13 is provided therein with four fine adjustment mechanisms 20,two centering mechanisms 30, four holding mechanisms 40, two eccentrictransmission mechanisms 50, one positioning fixing means 60, and thelike.

FIGS. 3( a) and 3(b) are enlarged views of the part IIII of FIG. 2 andshow the fine adjustment mechanism for the pod cover removing-installingapparatus of the first embodiment.

The fine adjustment mechanism 20 supports the position adjusting plate13B movable in the direction vertical to the plane and exactly adjuststhe position of the positioning pins 14 a and 14 b. This fine adjustmentmechanism 20 is provided in the four corners of the position adjustingplate 13B (see FIG. 1), each having a fixture 21 for fastening andsecuring the base plate 13A using a thread 21 a, a female screw 22 forkeeping the fixture 21 from loosening, a receiving member 23 of freebearings and the like inserted into the fixture 21, a ball 24 rotativelysupported by the receiving member 23, an opposing plate 25 provided inthe base plate frame 13A-1 on the opposing side, a receiving member 26provided in the opposing plate 25, a ball 27 rotatively supported in thereceiving member 26, a guide plate 28 provided on the side of positionadjusting plate 13B and movably squeezed by the ball 24 and the ball 27.

The fine adjustment mechanism 20 is designed so that in the initialstate in which the positioning pins 14 a, 14 b engage the pin holes 204a, 204 b of the pod 200 (see FIG. 21), tapered tips of the positioningpins 14 a, 14 b move a prescribed distance (e.g. 3 mm in everydirection) vertically to the plane, while the tapered tips match thetapered pin holes 204 a, 204 b. For this reason, even if there is someerror in the position of the pin holes 204 a, 204 b of the pod 200, thepositioning pins 14 a, 14 b can easily engage these pin holes withoutcolliding.

FIGS. 4( a) and 4(b) are enlarged views of the part IV of FIG. 2 andshow the centering mechanism for the pod cover removing-installingapparatus of the first embodiment.

The centering mechanism 30 is a mechanism for causing the positionadjusting plate 13B to return to the center. The centering mechanism 30,consisting of two systems, one in the horizontal direction (x direction)and the other in the vertical direction (y direction), is provided withpress boards 31 x, 31 y, securing members 32 x, 32 y for securing thepress boards 31 x, 31 y in the base plate 13A, coil springs 33 x, 33 yfor moving the press boards 31 x, 31 y to the center, securing members34 x, 34 y for securing the other ends of the coil springs 33 x, 33 y tothe base plate 13A, guide pieces 35, 37 which come into contact with thepress boards 31 x, 31 y, securing members 36, 38 for securing the guidepieces 35, 37 in the position adjusting plate 13B and base plate 13A,and the like.

The press board 31 x aligns the guide pieces 35, 37 on a straight linein the X direction. In the same manner, the press board 31 y aligns theguide pieces 35, 37 on a straight line in the Y direction. The positionadjusting plate 13B is centered by these actions.

Although omitted from FIG. 2, a mechanism which is the same butsymmetrical with the mechanism shown in the upper right side is providedin the upper left side of the FIG. 2.

Because the position adjusting plate 13B can move vertical to the planewith respect to the base plate 13A by means of the fine adjustmentmechanism 20, the centering mechanism 30 always causes the positionadjusting plate 13B to be positioned in the previously determined centerposition (the engaging position without an error) in the initial statein which the positioning pins 14 a, 14 b engage the pin holes 204 a, 204b of the pod 200 (see FIG. 21).

FIG. 5 is a cross sectional view along the line V-V of FIG. 2 and showsthe holding mechanism of the pod cover removing-installing apparatus ofthe first embodiment.

The holding mechanism 40 holds the position adjusting plate 13B to thecover 203 of the pod 200 at the position where the positioning pins 14a, 14 b engage. The holding mechanism 40 has a securing plate 41provided in a base plate frame 13A-1, a joint 43 connected with thissecuring plate 41 through the O-ring 42, having a nozzle (not shown inthe figure) connected to a vacuum pressure source, and an absorption pad44 provided in the joint 43 which is capable of being attached to theposition adjusting plate 13B.

Because the position adjusting plate 13B can move vertical to the planewith respect to the base plate 13A by means of the fine adjustmentmechanism 20, the holding mechanism 40 can hold the positioning pins 14a, 14 b to engage the pin holes 204 a, 204 b of the pod 200 (see FIG.21). This structure ensures that the container maintains the sameposition as the position before removal when the cover 203 has been onceremoved and returned thereafter. Therefore, the cover can be closedwithout impediment.

FIG. 6( a) is a perspective view and FIG. 6( b) is a cross sectionalview along the line VI-VI of FIG. 2, showing an eccentric transmissionmechanism for the pod cover removing-installing apparatus of the firstembodiment.

The T-shaped key 14 c (14 d) is provided in a prescribed position of theposition adjusting plate 13B to engage the key hole 204 c (204 d) of thecover 203 to lock the cover 203, and driven by a lock drive mechanism 70(see FIG. 2). This lock drive mechanism 70 is provided on the side ofthe base plate 13A and rotates in either direction around the axis ofthe T-shaped key 14 c (14 d) to perform locking or unlocking movements.

Because it is desirable to make the position adjusting plate 13B lightfor ease of movement, the lock drive mechanism 70 and the like arepreferably installed on the base plate 13A. For this reason, aneccentric transmission mechanism 50 is provided to transmit a drivingforce from the lock drive mechanism 70 to the T-shaped key 14 c (14 d).

This eccentric transmission mechanism 50 allows a deflection of the baseplate 13A and position adjusting plate 13B in the direction vertical tothe plane and transmits a rotational force of the lock drive mechanism70 to the T-shaped key (locking member) 14 c (14 d).

As shown in FIGS. 6( a) and 6(b), the eccentric transmission mechanism50 has a driving lever 51 connected to the lock drive mechanism 70, arotation lever 52 rotatively connected to the driving lever 51, abearing 54 supporting the rotation lever 52 on the base plate 13A in afreely rotative manner, transmission rollers 53A, 53B provided on therotation lever 52, a slide disc 55 having grooves 55 a, 55 borthogonally provided on both sides, into which the transmission rollers53A, 53B and transmission rollers 56A, 56B are respectively inserted, arotation board 57 provided on the same axis with the T-shaped key 14 c(14 d), a bearing 58 having the transmission rollers 56A, 56B providedtherein and supporting the axis of the rotation board 57 and theT-shaped key 14 c (14 d) on the position adjusting plate 13B in a freelyrotative manner, and the like.

The eccentric transmission mechanism 50 transmits a rotational force ofthe lock drive mechanism 70 to the T-shaped key 14 c (14 d), even if theposition adjusting plate 13B moves from its original position within amovable range in the direction vertical to the plane.

Here, as shown in FIG. 2, the lock drive mechanism 70 is provided with amotor 71, a drive screw 73 to which the rotation of the motor 71 istransmitted by a belt 72, a slide axis 74 arranged in parallel with thedrive screw 73, a moving block 75 freely slidably supported in the slideaxis 74 and driven by a drive screw 73, a bearing 76 secured on a movingblock 75 and engaging a long hole in the transmission lever 51, and thelike.

When the bearing 76 is in the position (a), the rotation lever 52 is inthe position (a). When the bearing 76 moves to the right and comes tothe position (b), the rotation lever 52 rotates. This causes thetransmission lever 51 to move that distance and to descend to the pointindicated by a chain line connected by two dots. Because the bearing 76is secured on the moving block 75, the horizontal level of the position(b) remains the same as that of the position (a). Because of this, adeviation of the engaging position of the transmission lever 51 and thebearing 76 is absorbed by the long hole of the transmission lever 51.

FIG. 7 is a cross sectional view along the line VII-VII of FIG. 2 andshows the positioning securing means of the pod coverremoving-installing apparatus of the first embodiment.

The position securing means 60 secures the positioning pins 14 a, 14 bin the pin holes 204 a, 204 b when the positioning pins 14 a, 14 bengage the pin holes (the parts to be engaged) 204 a and 204 b of thepod 200 and their positions are determined.

The position securing means 60 of this embodiment has a passage 61provided in the axial direction of the positioning pin 14 a (14 b), apassage 62 provided in the vertical direction of the passage 61 andjoining therewith, a stretch member 63 formed from rubber such asneoprene provided around the circumference of the positioning pin 14 a(14 b) and capable of stretching according to an increase or decrease inthe internal pressure, a pipe 64 connected with the passage 61, asecuring member 65 for securing the pipe 64 at the rear end of thepositioning pin 14 a (14 b), and the like.

In this position securing means 60, pipe 64 is connected to a pneumaticcircuit or a vacuum circuit, not shown in the figure, which causes theinternal pressure of the passages 61, 62 to increase or decrease,thereby causing the stretch member 63 to expand or contract, causing thegap between the positioning pins 14 a, 14 b and the pin holes 204 a, 204b to be filled out. The positioning pins 14 a, 14 b are secured in theposition in this manner.

FIG. 8 is a block diagram showing a control means for the pod coverremoving-installing apparatus of the first embodiment, and FIGS. 9-12are flow charts showing operations of the cover removing-installingapparatus.

The control means 80 has various sensors 81 for detecting the positionsand the like of each moving part, a controller 82 which produces variouscontrol signals to control each drive part, described later, based onthe position detection signals from the sensors 81, a driver 83 forconverting control signals from the controller 82 into drive signalsconforming to each drive part, and a drive part driven based on thedrive signals from the driver 83, including a position-keeping valve 84which controls the flow of the air pressure to the holding mechanism 40,a cover securing valve 85 which controls the flow of the air pressure toa cover securing means 60, a cover locking motor 71 of a lock drivemeans 70, a container moving motor 86, a door moving motor 87, and thelike.

Next, the cover opening operation will be described referring to FIGS. 9and 10.

The controller 82 drives the position-keeping valve 84 to the releaseside (Step 101, the step is hereinafter referred to as “S”) and, uponconfirmation of release with a sensor (S102, YES), drives the containermoving motor 86 to move the pod 200 forward (S103), then, uponconfirmation that the pod 200 has come to the joining position (S104,YES), stops the container moving motor 86.

Because the holding mechanism 40 is canceled in this state by theposition-keeping valve 84, the position adjusting plate 13B is not onlyfree, but also has been moved to the center by the centering mechanism30. When the pod 200 comes to the joining point, the position adjustingplate 13B can be moved by the fine adjustment mechanism 20, enabling thecomplete joining of the cover 203 of the pod 200 and the door 13 eventhough the pin holes 204 a and 204 b of the pod 200 deviate in theallowable range with respect to the positioning pins 14 a, 14 b.

Next, the cover locking motor 71 is driven to the unlock side (S105) andthe T-shaped keys 14 c and 14 d are rotated to retract the nails 204e-204 h of the cover 203. When the sensor confirms that the nails 204e-204 h have been retracted (unlock) (S106, YES), the cover securingvalve 85 is driven to the securing side (S107) to expand the stretchmember 63 of the positioning pins 14 a, 14 b, confirming the securing ofthe pin holes 204 a, 204 b with the sensor (S108, YES).

In the final stage of the operation S107, even if there is a deviationbetween the positioning pins 14 a, 14 b and pin holes 204 a, 204 b, andthe position adjusting plate 13B has been moved, the T-shaped keys 14 c,14 d can rotate due to the eccentric transmission mechanism 50.

Moreover, accurate positioning is possible because the pin holes 204 a,204 b are secured by expanding the stretch member 63 of the positioningpins 14 a, 14 b.

Next, as shown in FIG. 10, the position-keeping valve 84 is driven tothe hold side (S109), confirming the holding with the sensor (S110,YES), and causing the door to reverse by driving the door moving motor87 (S111). Upon confirmation that the door has reversed (S112, YES), thedoor moving motor 87 is further driven to move the door downward (S113).When the door has reached the lower limit (S114, YES), the operation toterminate the process is stopped.

In this state, the position-keeping valve 84 is driven to the hold sideand holds the position of the position adjusting plate 13B in itsoriginal position in the later-described door closing operation.Therefore, the door does not collide with the opening 202 of the pod 200when closed.

Next, the cover closing operation will be described referring to FIGS.11 and 12.

Referring to FIG. 11, the controller 82 drives the door moving motor 87to elevate (S201) to the upper limit point (S202, YES), then to goforward (S203) until it starts rejoining the pod 200. Upon confirmationof the initiation of rejoining by a sensor (S204, YES), theposition-keeping valve 84 is driven to the release side (S205). Uponconfirmation of the release by a sensor (S206, YES), the door movingmotor 87 is driven forward (S207) until rejoining is complete, whereuponthe door moving motor 87 is stopped and the rejoining with the pod 200is confirmed by a sensor (S208).

Next, the cover securing valve 85 is driven to the release side (S209)to cause the stretch member 63 of the positioning pins 14 a, 14 b tobecome contracted. The release from the pin holes 204 a, 204 b isconfirmed by a sensor (S210, YES). The cover locking motor 71 is drivento the lock side (S211) to rotate the T-shaped keys 104 c, 104 d andcause the nails 204 e to 204 h to protrude and lock the cover, which isconfirmed by a sensor (S212, YES).

Finally, the container moving motor 86 is driven to move the pod 200backward (S213). Upon confirmation by a sensor that the pod 200 hasreversed (S104, YES), the container moving motor 86 is stopped toterminate the cover closing operation.

Second Embodiment

FIGS. 13-16( a) and (b) show the main parts of the pod coverremoving-installing apparatus of the second embodiment, wherein FIG. 13is a front view, FIG. 14( a) is a cross sectional view along the lineA-A of FIG. 13, FIG. 14( b) is a cross sectional view along the line B-Bof FIG. 13, FIG. 15( a) is a view from the direction of the arrow E ofFIG. 15( b), FIG. 15( b) is a cross sectional view along the line C-C ofFIG. 13, and FIGS. 16( a) and (b) are cross sectional views along theline D-D of FIG. 13.

The second embodiment of the pod cover removing-installing apparatushas, in addition to the structure of the first embodiment, a coversecuring means which secures the cover 203 to the door 13 by retractingthe lock pins 13 a, 13 b (by pulling down in FIG. 13) to the door 13side.

A linear motion from a drive means, not shown in the drawing, to a rack312 in FIG. 13 rotates a pinion gear 311 which engages the rack 312. Adisc 310 is coaxially screwed to the pinion gear 311.

The disc 310 can rotate by 180°, causing the T-shaped key 14 c (14 d) torotate in the first 90° rotation and drawing the T-shaped key 14 c (14d) to the direction of the arrow F in the next 90° rotation, therebysecuring the cover 203 to the door 13 (the cover securing means).

A disc 309 is installed on an axis 309 a in a freely rotative mannerwithin an angle of 90°. The axis 309 a is screwed to the base plate 13A.A rotation from the disc 310 is transmitted to the disc 309 via a rotor(bearing) which is screwed to the groove formed on the bottom of thedisc 309 and the top of the disc 310.

A rotating disc 306 is connected to the rotating disc 309 via a movingbody 308 and a bearing 307, as shown in FIG. 14( a). The moving body 308and the bearing 307 allow the rotation of the rotating disc 309 and therotating disc 306, even if these deviate in any direction, i.e. up anddown, right and left, or front and back.

Because not only the disc 305 is connected to the disc 306 via a support320 and a bush 321 (FIG. 13), but also these parts are pressed togetherby a spring, the discs 305 and 306 rotate as an integral body.

The T-shaped key 14 c (14 d) is held on a holding base 302 movable inthe axial direction. A push-down board 303 is connected to the holdingbase 302. The push-down board 303 is provided with a bearing 304 whichmaintains contact with the surface of the disc 305 while rotating. Thedisc 305 is pushed upward by the spring 301. The contact of the disc 305with the holding base 302 ensures accurate determination of the positionof the T-shaped key 14 c (14 d) in the axial direction.

The T-shaped key 14 c (14 d) rotates 90° by a first 90° rotation of thedisc 310 according to the above mechanism to complete a lock (or unlock)operation. In this instance, the rotation can be transmitted even if therotating disc 309 and the rotating disc 306 deviate in any direction (upand down, right and left, or front and back) due to the existence of themoving body 308 and the bearing 307 (eccentric transmission mechanism).

As shown in FIGS. 13 and 15( a) and (b), a roller 318 is attached to abracket 322 provided in the base plate 13A and comes into contact withthe bottom of the disc 310 to prevent downward deflection of the disc310.

A groove 310 a is formed on the surface of the disc 310 as shown in FIG.16( b). The bottom of the groove 310 a slopes from the highest point 310b to the lowest point 310 c. A bearing 313 enters the groove 310 a andmoves. The bearing 313 is installed on the bottom of the support member324 which is provided in a freely slidable manner in the collar 323installed on the bracket 322. The support member 324 has a cylindricalupper portion into which a support column 316 is inserted through aspring 315. A pin 314 is provided in the support member 324 to preventits rotation. Because the pin 314 engages a long hole provided in thebracket 322, the support member 324 does not rotate even if it moves upand down.

A base seat 317 is screwed to a push-down board 303, with the bottom incontact with the top of the support member 316. The push-down board 303is freely rotatively supported by a pin 319 and rotates counterclockwisein the FIG. 13 by a force pressing the base seat 317 upward (arrow G),thereby transmitting a push-down force (arrow F) to a bearing 304 whichis provided on the other end.

Specifically, the push-down board 303 pushes down the T-shaped key 14 c(14 d) via the above-described mechanism in the next 90° rotation of thedisc 310, whereby the cover 203 of the pod 200 may be secured to thedoor 13.

The second embodiment enables one driving force to cause rotation of theT-shaped key 14 c (14 d) and a pull-in operation of the T-shaped key 14c (14 d) to secure the cover 203 to the door 13. In addition, theapparatus of the second embodiment is also provided with an eccentrictransmission mechanism which allows deviation of the base plate 13A andthe position adjusting plate 13B.

Third Embodiment

FIG. 17 shows a holding mechanism of the pod cover removing-installingapparatus according to a third embodiment.

A holding mechanism 440 has a securing plate 441 provided in a baseplate frame (not shown), a base plate 445 provided on the securing plate441, a main body 443 connected to the base plate 445 through an O-ring442 and having a nozzle connected to a vacuum pressure source 451, anabsorption pad 444 provided in the main body 443 and having a seat 444 ato attach to the position adjusting plate 13B.

In this embodiment, a space 446 is formed between the absorption pad 444and the base plate 445. The base plate 445 is provided with a nozzle 447to connect the space 446 to an air pressure source 452.

A vacuum pressure source 451 is connected to the nozzle of the main body443 through solenoid valves SV1 and SV2. The air pressure source 452 isconnected to the nozzle 447 through a solenoid valve SV3.

The NC port of the solenoid valve SV1 spacially communicates with thevacuum pressure source 451, the NO port with the atmosphere, and the Cport with the C port of the solenoid valve SV2. The NC port of thesolenoid valve SV2 spacially communicates with the nozzle 443, and theNO port with NC port of the solenoid valve SV3. The C port of thesolenoid valve SV3 spacially communicates with the air pressure source452 and the NO port is shut off.

If the solenoid valves SV1, SV2, and SV3 are on the NC port side asshown in FIG. 17, with the vacuum pressure source 451 being evacuatedand high pressure air being supplied from the air pressure source 452,the seat 444 a of the adsorption pad 444 is pushed to the positionadjusting plate 13B side by the pressure of the space 446 and thepressure of the space 448 inside the seat part 444 a becomes negative,thereby accelerating the adherence of the adsorption pad 444.

On the other hand, if the solenoid valve SV1 is switched to the NO portside to open the space 448 to the atmosphere, then the solenoid valvesSV2, SV3 are switched to the NO port side to open the space 446 to theatmosphere, the solenoid valve SV1 is switched to the NC port side, andthe space 446 is adsorbed to accelerate release of the adsorption pad444.

The third embodiment thus accelerates the adherence and releaseoperations of the position adjusting plate 13B. In addition, because theseat part 444 a separates from the position adjusting plate 13B duringthe release operation, the position adjusting plate 13B can movesmoothly.

Fourth Embodiment

FIGS. 18( a), (b), and (c) show a positioning member of the pod coverremoving-installing apparatus according to a fourth embodiment.

FIG. 18( c) shows a conventional system. In this system, if thedeviation of the positioning pin 14 a and the pin hole 204 a becomeslarger than δ0=1-1.5 mm, the positioning pin 14 a may not smoothly enterthe pin hole 204 a depending on a taper 204 t of the pin hole 204 a onthe pod 200 side.

A positioning member 500 of the fourth embodiment is provided with anouter casing 501 and an inner casing 502. The outer casing 501 is acylinder having a taper 501 a formed on the tip, a brim 501 b formed onthe outside, a step 501 c formed inside, a thread part 501 d formed inthe back of the brim 501 b, and the like, and is secured to thepositioning plate 13B using the brim 501 b.

The inner casing 502 is a cylinder inserted into the outer casing 501and has a taper 502 a having the same angle as the taper 501 a of theouter casing 501, and a brim 502 b formed on the outside of the end,wherein the brim 502 b engages the step 501 c to regulate the protrusionto a prescribed length.

A spring 503 inserted in the inner casing 502 pushes the inner casing502 in the protrusion direction. A box nut 504 thrust in a thread 501 dof the outer casing 501 secures the outer casing 501 to the positionadjusting plate 13B and regulates the location of the end of the spring503.

As shown in FIG. 18( a), because the outer casing 501 and the innercasing 502 are provided with a taper 501 a or 502 a having the sameangle which is more acute than the conventional angle and a lengthlonger than a conventional one, these are smoothly linked even if thedeviation is in the range of δ1=3.0-3.5 mm.

As shown in FIG. 18( b), because the inner casing 502 escapes resistingthe pushing force of the spring 503 after the completion of linking, thedepth of the pin hole 204 a may be the same depth (L=11 mm) as the pinhole of the conventional pod 200.

Fifth Embodiment

FIGS. 19( a), (b), (c), and (d) show a positioning member for the tableof the pod cover removing-installing apparatus according to a fifthembodiment.

The positioning pins 15 a-15 c of the table 15 (see the table 105 ofFIG. 21) are arranged as shown in FIG. 19( b). For this reason, when thetable 15 moves in the direction of the arrow M, a force pushing up thepod 200 in the direction of the arrow N (N1) is generated in theV-shaped grooves 205 a, 205 c. However, no excessive force is producedby the V-shaped groove 205 c which is parallel to the moving direction.

As a result, a rotation force around the positioning pin 15 c in thedirection of the arrow P (P1) is created in the pod 200 as shown in FIG.19( d). Because of this, the top end of the pod 200 may be separatedfrom the partition board 11, resulting in problems such as defectivesealing.

In the fifth embodiment, because the vertical fixed side 605 a-1 (605b-1, 605 c-1) provided in the V-shaped groove 605 a (605 b, 605 c)formed on the bottom surface of the pod 600 enables the pod 600 to comeinto contact with the vertical fixed side 15 a-1 (15 b-1, 15 c-1) of thepositioning pin 15 a (15 b, 15 c) (a bonding posture corrective means),no force pushing the pod 600 upward is created even if the container ispushed in the horizontal direction.

Sixth Embodiment

FIGS. 20( a) and (b) show a positioning member of the pod coverremoving-installing apparatus according to a sixth embodiment.

The fifth embodiment cannot be applied to a pod 200 which has alreadybeen used. Modification of the types and the like is necessary to changesuch a pod. For this reason, the sixth embodiment is provided with abinding posture corrective mechanism 700 which corrects the linkingposition of the pod 200.

The binding posture corrective mechanism 700 is provided with a rotor701 such as a bearing provided on the top and side of the door frame 16connected to the cover frame 207 of the pod 200 and maintaining contactwith the cover frame 207, a moving board 702 rotatively supporting therotor 701 on the left end thereof and rotatively supported by the axis702 a at the upper right end, a linking member 705 which links themoving board 702 with a fixed board 703 so that the rotor 701 alwayspresses the cover frame 207 with a spring 704 between them and regulatesthe counterclockwise rotation (arrow Q) of the moving board 702, aregulating member 706 provided on the fixed board 703 to regulate theclockwise rotation (arrow R) of the moving board 702, and the like.

The rotor 701 can not only freely move in the moving direction (arrow M)on the table 15 by its rotation, but can also freely move in the rightangle direction of the arrow M by the rotation of the moving board 702.The rotor 701 is arranged so that it always presses the pod 200 by aspring 704. In addition, the movable range for the rotor 701 is limitedvia a movable board 702 to the minimum push-out position of the linkingmember 705 and the maximum push-out position of the regulating member706.

Therefore, the top and the side of the pod 200 can be pressed in thelinked position so that the pod 200 is held in a normal posture ready tobe linked.

Modification

The present invention is not limited to the above-described embodimentsand can be varied or modified in various ways. Such variations andmodifications are within the scope of equivalency of the presentinvention.

For example, although the cover securing means was described in FIG. 7using a stretch member 63 by way of example, a modified type having abroken part in the positioning pin 14 a (14 b) to mechanically changethe diameter of the positioning pin 14 a (14 b) can be used for securingthe pins in the pin holes.

Obviously, numerous modifications and variations of the presentinvention are possible in light of the above teachings. It is thereforeto be understood that, within the scope of the appended claims, theinvention may be practiced otherwise than as specifically describedherein.

1. A pod cover removing-installing apparatus to remove and install a cover for an opening of a pod, an inside of which is kept extremely clean, by causing the cover to engage a door for an opening of a high cleanliness room, while maintaining high cleanliness of the pod and the room by closely attaching a circumference of the two openings, the pod cover removing-installing apparatus comprising: a positioning member to determine a position of the cover; a fine adjustment mechanism to finely adjust the position of the positioning member; and a holding mechanism to hold the position of the cover mated with the door of the high cleanliness room, wherein the positioning member includes: an outer casing with a tapered end; an inner casing installed freely movable in an axial direction of the outer casing, having a taper with an angle measuring the same as the taper of the outer casing at the tapered end and arranged so that the two tapers become continuous when protruding; and a pushing device to push the inner casing in a protruding direction.
 2. The pod cover removing-installing apparatus according to claim 1, further comprising: a movable pod table having the pod installed thereon; and a linking pin provided on the pod table, wherein the linking pin is substantially vertically aligned with respect to a moving direction of the pod table and comes in contact with a fixed side which is substantially vertically aligned with respect to the moving direction of the pod table, and the fixed side is provided in a V-section groove provided on a bottom of the pod.
 3. The pod cover removing-installing apparatus according to claim 1, further comprising: a linking posture corrective device to correct a linking posture of the pod, wherein the linking posture corrective device includes a pressing member provided on a periphery of the door to press a top and/or a side of the cover of the pod and capable of freely moving in a moving direction of a pod table and in a direction vertical thereto within a prescribed movable range.
 4. A pod cover removing-installing apparatus to remove and install a cover for an opening of a pod, an inside of which is kept extremely clean, by causing the cover to engage a door for an opening of a high cleanliness room, while maintaining high cleanliness of the pod and the room by closely attaching a circumference of the two openings, the pod cover removing-installing apparatus comprising: a lock member to lock the cover by engaging the same; a cover securing device to secure the cover to the door by retracting the lock member to a door side; and a linking posture corrective device to correct a linking posture of the pod, wherein the linking posture corrective device includes a pressing member provided on a periphery of the door to press a top and/or a side of the cover of the pod and capable of freely moving in a moving direction of a pod table and in a direction vertical thereto with a prescribed movable range.
 5. A pod cover removing-installing apparatus to remove and install a cover for an opening of a pod, an inside of which is kept extremely clean, by causing the cover to engage a door for an opening of a high cleanliness room, while maintaining high cleanliness of the pod and the room by closely attaching a circumference of the two openings, the pod cover removing-installing apparatus comprising: a positioning member to determine a position of the cover by engaging an engaged part of the cover; and a position securing device to position and secure the positioning member to the engaged part of the cover by changing an external diameter of the positioning member, wherein the position securing device is formed in the positioning member and has a split part to change a diameter thereof by a mechanical force, and wherein the positioning member includes: an outer casing with a tapered end; an inner casing installed freely movable in an axial direction of the outer casing, having a taper with an angle measuring the same as the taper of the outer casing at the tapered end, and arranged so that the two tapers become continuous when protruding; and a pushing device to push the inner casing in a protruding direction.
 6. A pod cover removing-installing apparatus to remove and install a cover for an opening of a pod, an inside of which is kept extremely clean, by causing the cover to engage a door for an opening of a high cleanliness room, while maintaining high cleanliness of the pod and the room by closely attaching a circumference of the two openings, the pod cover removing-installing apparatus comprising: a positioning member to determine a position of the cover by engaging an engaged part of the cover; a position securing device to position and secure the positioning member to the engaged part of the cover by changing an external diameter of the positioning member; and a linking posture corrective device to correct a linking posture of the pod, wherein the linking posture corrective device includes a pressing member provided on the periphery of the door to press a top and/or a side of the cover of the pod and capable of freely moving in a moving direction of a pod table and in a direction vertical thereto with a prescribed movable range.
 7. A pod cover removing-installing apparatus to remove and install a cover for an opening of a pod, an inside of which is kept extremely clean, by causing the cover to engage a door for an opening of a high cleanliness room, while maintaining high cleanliness of the pod and the room by closely attaching a circumference of the two openings, the pod cover removing-installing apparatus comprising: a positioning member to determine a position of the cover, wherein the positioning member includes: an outer casing with a tapered end; an inner casing installed freely movable in an axial direction of the outer casing, having a taper with an angle measuring the same as the taper of the outer casing at the tapered end and arranged so that the two tapers become continuous when protruding; and a pushing device to push the inner casing in a protruding direction. 